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标题: Secondary ion mass spectrometry analysis of ultrathin impurity layers in semi... [打印本页]

作者: Anthea14    时间: 2013-9-26 00:01
标题: Secondary ion mass spectrometry analysis of ultrathin impurity layers in semi...
题名Secondary ion mass spectrometry analysis of ultrathin impurity layers in semiconductors and their use in quantification, instrumental assessment, and fundamental measurements
作者M. G. Dowsett, R. D. Barlow, and P. N. Allen
杂志J. Vac. Sci. Technol. B
年|卷|期1994, 12
页码186
链接http://avspublications.org/jvstb/resource/1/jvtbd9/v12/i1/p186_s1?isAuthorized=no


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