题名 | A model for reactive sputtering with magnetrons |
链接 | http://www.sciencedirect.com/science?_ob=MiamiImageURL&_cid=271582&_user=6492722&_pii=0042207X89907070&_check=y&_origin=browseVolIssue&_zone=rslt_list_item&_coverDate=1989-12-31&_docsubtype=fla&wchp=dGLzVlV-zSkzV&md5=569a04f0bfed75c871bf933afe1bbea7&pid=1-s2.0-0042207X89907070-main.pdf |
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