题名 | Influence of discharge parameters on the layer properties of reactive magnetron sputtered ZnO:Al films |
链接 | http://www.sciencedirect.com/science?_ob=MiamiImageURL&_cid=271603&_user=6492722&_pii=0040609094904707&_check=y&_coverDate=1994-07-01&view=c&wchp=dGLzVlS-zSkWz&md5=7283c29833b423bfe87dcbd317186be2&pid=1-s2.0-0040609094904707-main.pdf |
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