题名 | Langmuir probe measurements of a radio frequency induction plasma |
作者 | J. Hopwood, C. R. Guarnieri, S. J. Whitehair, and J. J. Cuomo |
杂志 | Journal of Vacuum Science & Technology |
年|卷|期 | Volume 11 / Issue 1 |
页码 | http://dx.doi.org/10.1116/1.578282 (5 pages) |
链接 | http://avspublications.org/jvsta/resource/1/jvtad6/v11/i1/p152_s1?isAuthorized=no |
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