标题: Performance of ultra-thin HfO2-based MIM devices after oxygen modulation and ... [打印本页] 作者: tookey0116 时间: 2016-9-5 08:20 标题: Performance of ultra-thin HfO2-based MIM devices after oxygen modulation and ...
题名
Performance of ultra-thin HfO2-based MIM devices after oxygen modulation and post-metallization annealing in N2